Analisis Pengaruh Variasi Konsentrasi HF dan Metal Oksida (Fe3O4 dan MnO2) Terhadap Performa Superkapasitor Berbasis Silikon

Bathari, Fischa Indaya (2026) Analisis Pengaruh Variasi Konsentrasi HF dan Metal Oksida (Fe3O4 dan MnO2) Terhadap Performa Superkapasitor Berbasis Silikon. Masters thesis, Institut Teknologi Sepuluh Nopember.

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Abstract

Telah dilakukan penelitian sebagai upaya pengembangan material elektroda berbasis silikon untuk aplikasi superkapasitor. Penelitian ini bertujuan untuk menganalisis pengaruh variasi konsentrasi larutan HF pada proses etching silikon serta pengaruh penambahan oksida logam MnO₂ dan Fe₃O₄ terhadap morfologi dan performa elektrokimia elektroda superkapasitor. Sampel yang digunakan meliputi silikon murni, porous silicon (pSi) dengan variasi konsentrasi HF 10% dan 20%, serta komposit pSi/MnO₂ dan pSi/Fe₃O₄. Sintesis pSi dilakukan melalui proses chemical etching menggunakan larutan HF yang kemudian dilanjutkan dengan proses pengompositan dan fabrikasi elektroda. Pengujian meliputi XRD, SEM-EDX, BET, CV, EIS, dan GCD. Hasil BET menunjukkan luas permukaan spesifik sebesar 119.35 m²/g untuk pSi 10% HF dan meningkat menjadi 149.80 m²/g pada elektroda komposit pSi 10% HF/MnO₂ dengan volume pori sebesar 0.1344 cc/g. Hasil pengujian CV menunjukkan bahwa elektroda pSi 10% HF/MnO₂ menghasilkan kapasitansi spesifik tertinggi sebesar 16.00 F/g pada scan rate 0.01 V/s, sedangkan pengujian GCD pada current density 0.5 A/g menghasilkan kapasitansi spesifik sebesar 103.20 F/g. Pada pengujian EIS, elektroda pSi 10% HF/MnO₂ menunjukkan sudut fasa sebesar 82.9° pada frekuensi 0.01 Hz yang mengindikasikan respons kapasitif dominan dengan kontribusi pseudokapasitif. Berdasarkan Ragone plot, seluruh elektroda berada pada wilayah superkapasitor dan berpotensi diaplikasikan sebagai material penyimpanan energi.
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This study was conducted as an effort to develop silicon-based electrode materials for supercapacitor applications. The research aims to investigate the effect of HF concentration during silicon etching as well as the influence of MnO₂ and Fe₃O₄ metal oxide incorporation on the morphology and electrochemical performance of supercapacitor electrodes. The samples consisted of pristine silicon, porous silicon (pSi) prepared using 10% and 20% HF, and pSi/MnO₂ and pSi/Fe₃O₄ composites. Porous silicon was synthesized via chemical etching using HF solution, followed by composite formation and electrode fabrication. Characterizations were performed using XRD, SEM-EDX, BET, CV, EIS, and GCD. BET analysis showed a specific surface area of 119.35 m²/g for pSi 10% HF, which increased to 149.80 m²/g for the pSi 10% HF/MnO₂ composite with a pore volume of 0.1344 cc/g. CV results indicated that the pSi 10% HF/MnO₂ electrode exhibited the highest specific capacitance of 16.00 F/g at a scan rate of 0.01 V/s. Furthermore, GCD measurements at a current density of 0.5 A/g yielded a specific capacitance of 103.20 F/g. EIS analysis revealed a phase angle of 82.9° at 0.01 Hz, indicating dominant capacitive behavior with a pseudocapacitive contribution. Based on the Ragone plot, all electrodes fall within the supercapacitor region and show potential for energy storage applications.

Item Type:	Thesis (Masters)
Uncontrolled Keywords:	Silikon, Fe3O4, MnO2, Silikon Berpori, Superkapasitor,Silicon, Fe3O4, MnO2, Porous silicon, Supercapacitor
Subjects:	Q Science > QD Chemistry > QD553 Electrochemistry. Electrolysis T Technology > TJ Mechanical engineering and machinery > TJ165 Energy storage. T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7872.C65 Supercapacitors. T Technology > TP Chemical technology > TP255 Electrochemistry, Industrial.
Divisions:	Faculty of Industrial Technology and Systems Engineering (INDSYS) > Material & Metallurgical Engineering > 27101-(S2) Master Thesis
Depositing User:	Fischa Indaya Bathari
Date Deposited:	27 Jan 2026 02:09
Last Modified:	27 Jan 2026 02:09
URI:	http://repository.its.ac.id/id/eprint/130411

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