Fabrikasi Dan Karakterisasi Modul Generator Termoelektrik Berbasis Material Indium Gallium Zinc Oxide/Indium Tin Oxide (IGZO/ITO) Pada Substrat Kaca

Rusdianto, Rr. Aurellia Salsabilla (2026) Fabrikasi Dan Karakterisasi Modul Generator Termoelektrik Berbasis Material Indium Gallium Zinc Oxide/Indium Tin Oxide (IGZO/ITO) Pada Substrat Kaca. Other thesis, Institut Teknologi Sepuluh Nopember.

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Abstract

Generator Termoelektrik merupakan teknologi yang mampu mengonversi energi panas menjadi energi listrik melalui efek Seebeck. Penelitian ini bertujuan untuk memfabrikasi dan mengkarakterisasi modul thin film thermoelectric berbasis Indium Gallium Zinc Oxide (IGZO) sebagai material tipe-n dan Indium Tin Oxide (ITO) sebagai material tipe-p pada substrat kaca menggunakan metode magnetron sputtering. Deposisi IGZO dilakukan menggunakan RF sputtering, sedangkan deposisi ITO menggunakan DC sputtering. Karakterisasi material dilakukan menggunakan UV-Vis, XRD, dan EDX, sedangkan performa termoelektrik dievaluasi melalui pengukuran tegangan rangkaian terbuka (Voc) dan daya maksimum (Pmax). Hasil karakterisasi UV-Vis menunjukkan bahwa lapisan IGZO memiliki direct band gap sebesar 3,4 eV dan indirect band gap sebesar 2,9 eV, sedangkan lapisan ITO memiliki direct band gap sebesar 3,4 eV dan indirect band gap sebesar 3,1 eV. Analisis XRD menunjukkan bahwa IGZO cenderung berstruktur amorf, sedangkan ITO memiliki karakter kristalin yang lebih dominan. Hasil EDX mengonfirmasi keberhasilan deposisi material pada substrat. Pengujian termoelektrik menunjukkan bahwa nilai Voc meningkat seiring bertambahnya perbedaan temperatur. Modul dengan resistansi internal 200 kΩ menghasilkan performa terbaik dengan daya maksimum teoritis sebesar 140,45 pW pada ΔT 42,4 K dan Voc 10,6 mV, sedangkan modul dengan resistansi internal 400 kΩ menghasilkan daya maksimum teoritis sebesar 76,63 pW pada ΔT 54,6 K dan Voc 11 mV. Hasil penelitian menunjukkan bahwa kombinasi IGZO dan ITO berpotensi untuk diaplikasikan sebagai modul thin film thermoelectric generator.
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Thermoelectric generators (TEGs) are devices capable of converting thermal energy into electrical energy through the Seebeck effect. This study aimed to fabricate and characterize a thin-film thermoelectric module based on Indium Gallium Zinc Oxide (IGZO) as the n-type material and Indium Tin Oxide (ITO) as the p-type material deposited on a glass substrate using the magnetron sputtering method. IGZO thin films were deposited using RF sputtering, while ITO thin films were deposited using DC sputtering. Material characterization was conducted using UV-Vis, XRD, and EDX, whereas thermoelectric performance was evaluated through open-circuit voltage (Voc) and maximum power (Pmax) measurements.The UV-Vis characterization results showed that the IGZO thin film exhibited a direct band gap of 3.4 eV and an indirect band gap of 2.9 eV, while the ITO thin film exhibited a direct band gap of 3.4 eV and an indirect band gap of 3.1 eV. XRD analysis indicated that the IGZO film tended to have an amorphous structure, whereas the ITO film exhibited a more dominant crystalline structure. EDX analysis confirmed the successful deposition of the constituent materials on the substrate. Thermoelectric measurements revealed that the open-circuit voltage increased with increasing temperature difference. The module with an internal resistance of 200 kΩ demonstrated the best performance, achieving a theoretical maximum power of 140.45 pW at a temperature difference of 42.4 K and a Voc of 10.6 mV. In comparison, the module with an internal resistance of 400 kΩ generated a theoretical maximum power of 76.63 pW at a temperature difference of 54.6 K and a Voc of 11 mV. These results indicate that the combination of IGZO and ITO has potential for application in thin-film thermoelectric generators.

Item Type:	Thesis (Other)
Uncontrolled Keywords:	generator termoelektrik, modul termoelektrik lapisan tipis, IGZO, ITO, sputtering magnetron, thermoelectric generator, thin film thermoelectric module, IGZO, ITO, magnetron sputtering
Subjects:	Q Science > QC Physics > QC162 Adsorption and absorption Q Science > QC Physics > QC271 Temperature measurements Q Science > QC Physics > QC320 Heat transfer Q Science > QC Physics > QC 611.97.T46 Temperature effects. Including transition temperature T Technology > TA Engineering (General). Civil engineering (General) > TA418.16 Materials--Testing. T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK2950 Thermoelectric materials.
Divisions:	Faculty of Science and Data Analytics (SCIENTICS) > Physics > 45201-(S1) Undergraduate Thesis
Depositing User:	Rr. Aurellia Salsabilla Rusdianto
Date Deposited:	30 Jul 2026 01:47
Last Modified:	30 Jul 2026 01:47
URI:	http://repository.its.ac.id/id/eprint/140286

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