PUSPITA, IKA (2017) SILICON WIRE WAVEGUIDE STUDY. Masters thesis, Institut Teknologi Sepuluh Nopember.
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Abstract
Birefringence in the silicon waveguide can affect the performance of the
silicon waveguide by causing the polarization mode dispersion (PMD), polarization
dependent loss (PDL), and wavelength shifting. This drives the need to study the
birefringence in the silicon waveguide and the waveguide parameters effect.
The birefringence in the silicon waveguide has been theoretically and
numerically investigated. The numerical investigation was performed to the
waveguide with the fixed lower oxide thickness of 3 μm by using FIMMWAVE
commercial software. There were three parameters to be studied in this research,
top cladding thickness, process temperature, and core dimension variation. In order
to illustrate the stress effect caused by thickness, the upper oxide thickness was
varied from 0.05 μm to 1 μm while the thermal stress was manipulated by varying
the changed process temperature. The core height variation of 0.2, 0.25, and 0.3 μm.
The core width was varied from 0.2 to μm to 0.45 μm to show the birefringence
profile. Then, those parameters varied simultaneously to get the birefringence
profile of the combination effect.
For the top cladding effect, the process temperature was set at 300 o C and
core dimension was fixed at 0.45 x 0.25 μm 2 . Based on the numerical investigation,
the top cladding thickness variation would significantly change the birefringence in
the thickness range of 0.05 μm – 0.3 μm and then kept insignificantly in the
thickness over 0.3 μm. The birefringence changed proportionally as the change of
stress. To observe the effect of core dimension variation, the top oxide cladding
thickness was fixed at 1 μm and the cooling process temperature was fixed at 300 o C.
For the silicon waveguide core thickness of 0.25 μm, the wider silicon waveguide
caused the large birefringence. Then, the coupled effect of top cladding thickness
variation and core width variation was also observed. The result showed that the
waveguide with the core dimension of 0.25 x 0.25 μm 2 and top cladding thickness
of 1 μm had the lowest birefringence. Finally, the waveguide core dimension and
top cladding thickness variation can be utilized to get the lowest birefringence, -
0.0024. In summary, the waveguide core dimension and top cladding thickness
could be manipulated to tune the birefringence in a silicon wire waveguide.
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Birefringence pada pandu gelombang silikon dapat mempengaruhi
performansi dari pandu gelombang karena menyebabkan dispersi moda (PMD),
rugi daya akibat polarisasi (PDL), dan pergeseran panjang gelombang. Oleh karena
itu diperlukan studi mengenai birefringence pada pandu gelombang silikon.
Pada penelitian ini telah dilakukan studi secara teori dan numerik terhadap
birefringence pada pandu gelombang silikon. Studi numerik dilakukan pada pandu
gelombang dengan ketebalan cladding bawah yang tetap sebesar 3 μm dengan
menggunakan software komersial FIMMWAVE. Ada tiga parameter yang diteliti
yaitu ketebalan cladding atas, suhu proses fabrikasi dan variasi dimensi core. Untuk
memberikan efek stres, ketebalan cladding atas divariasi dari 0,05 - 1 μm,
sedangkan stres termal diberikan dengan mengubah suhu proses fabrikasi. Tebal
core bervariasi yaitu 0,2; 0,25; dan 0,3 μm, sedangkan lebar core bervariasi dari 0,2
– 0,45 μm. Parameter – parameter tersebut divariasikan secara simultan untuk
mendapatkan profil birefringence akibat efek tersebut.
Untuk mengetahui efek dari cladding atas, simulasi dilakukan pada dimensi
core 0,45 x 0,25 μm 2 dan suhu proses sebesar 300 o C. Berdasarkan hasil yang
didapatkan variasi dari ketebalan cladding atas mengubah nilai birefringence secara
signifikan pada rentang 0,05 – 0,3 μm dan tidak mengubah nilai birefringence pada
ketebalan lebih dari 0,3 μm. Birefringence berubah secara proporsional terhadap
perubahan stres yang dialami oleh pandu gelombang. Untuk mengetahui efek dari
variasi dimensi core, ketebalan cladding atas ditetapkan sebesar 1 μm dan suhu
proses sebesar 300 o C. Pada pandu gelombang silikon dengan tebal core 0,25 μm,
pandu gelombang silikon dengan core yang lebih lebar mempunyai birefringence
yang besar. Pandu gelombang dengan dimensi core 0,25 x 0,25 μm 2 dan tebal
cladding atas sebesar 1 μm mempunyai nilai birefringence paling kecil, yaitu -
0.0024. Dimensi core dari pandu gelombang dan tebal cladding atas dapat
digunakan untuk mengatur nilai birefringence pada pandu gelombang silikon.
| Item Type: | Thesis (Masters) |
|---|---|
| Uncontrolled Keywords: | Silicon wire waveguide, birefringence, stress effect, geometrical effect |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK5101 Telecommunication |
| Divisions: | Faculty of Industrial Technology > Physics Engineering > 30101-(S2) Master Thesis |
| Depositing User: | IKA IKA PUSPITA |
| Date Deposited: | 25 Jan 2017 06:45 |
| Last Modified: | 09 Dec 2024 07:13 |
| URI: | http://repository.its.ac.id/id/eprint/3224 |
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