Rachmanita, Risse Entikaria (2017) Fabrikasi dan Karakterisasi Interdigital Capacitors Menggunakan Metode DC Magnetron Sputtering untuk Pengukuran Konstanta Dielektrik Crude Oil. Masters thesis, Institut Teknologi Sepuluh Nopember.
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Abstract
Interdigital Capacitors (IDCs) merupakan rangkaian terpadu yang berbentuk seperti pola sisir elektroda yang periodik untuk pengukuran sifat tertentu suatu bahan. Fabrikasi dan karakterisasi elektroda thin film IDCs telah dilakukan untuk pengukuran konstanta dielektrik crude oil. Elektroda thin film dibuat dengan metode DC Magnetron Sputtering menggunakan bahan target perak, molibdenum dan tembaga. Konfigurasi elektroda disusun dalam tujuh desain yang berbeda pada panjang, lebar, gab dan jumlah elektroda. IDCs dicetak pada substrat papan PCB FR-4. Kondisi deposisi masing-masing thin film berbeda pada base pressure, operating pressure, tegangan, aliran arus dan waktu deposisi. Nilai resistansi pada masing-masing lengan elektroda dalam satu desain memiliki nilai yang hampir sama, menunjukkan bahwa karakteristik masing-masing lengan elektroda juga hampir sama. Nilai resistansi setiap desain IDCs berbeda karena bergantung pada nilai resistivtas bahan, panjang dan luas area penampang elektroda. Sedangkan nilai kapasitansi setiap desain IDCs berbeda karena hanya dipengaruhi oleh faktor geometri, seperti panjang elektroda, lebar elektroda, jarak antar elektroda dan jumlah elektroda. Hasil karakterisasi thin film Ag dan Cu dengan X-Ray diffraction hampir sama dengan data referensi, namun untuk thin film Mo terdapat pergeseran puncak difraksi karena tersubstitusi oleh oksida. Konstanta dielektrik crude oil telah diukur dengan menggunakan PM 6303A RCL meter pada frekuensi 1 kHz dan pada suhu ruang 26,6ᵒC. Hasil Pengukuran konstanta dielektrik crude oil A, B and C IDCs thin film Ag desain g masing-masing adalah 3,15, 4,46 dan 3,32. Nilai konstanta dielektrik masing-masing crude oil semakin meningkat dengan kenaikan suhu pada rentang 30 – 70ᵒC.
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The Interdigital Capacitors (IDCs) are integrated circuits within metal fingers electrode for measurement of specific properties. A new model has been carried out for fabrication and characterization of thin film electrode IDCs for the measurement of crude oil dielectric constant. Thin film electrode was fabricated by DC Magnetron Sputtering method using silver, molybdenum and copper target. The electrode configuration was composed in seven designs, different on length, width, gab and number of electrode. The IDCs fabricated on FR-4 PCB board. Deposition condition of each thin film is different in base pressure, operating pressure, voltage, current flow and deposition time. The resistances of each electrode fingers in one design have almost the same value that is indicate both of electrode fingers have almost the same characteristics. The resistance of each design has different values because it depends on the material resistivity, length and cross-sectional area. While the capacitance value of all IDCs design is different because the capacitance only depends on the geometric factor, i.e. the length of electrode, the width of electrode, gab between electrodes and electrodes number. The characterization result of Ag and Cu thin film by using X-Ray diffraction is almost the same as reference data, but for Mo film there is a diffraction peak shift because it is substituted by oxide. The dielectric constants of crude oils were measured by – 1 kHz frequency of PM 6303A RCL meter at room temperature 26.6 ᵒC. The measurement results of dielectric constants of crude oils A, B and C by using IDCs Ag thin film g design are 3.15, 4.46 and 3.32 respectively. The dielectric constant value of each crude oil increases with the temperature rise in the range of 30 – 70ᵒC.
| Item Type: | Thesis (Masters) |
|---|---|
| Uncontrolled Keywords: | Interdigital capacitors, DC magnetron sputtering, konstanta dielektrik, crude oil |
| Subjects: | Q Science > QC Physics Q Science > QC Physics > QC271 Temperature measurements |
| Divisions: | Faculty of Mathematics and Science > Physics > 45101-(S2) Master Thesis |
| Depositing User: | Risse Entikaria Rachmanita |
| Date Deposited: | 23 Jul 2025 03:09 |
| Last Modified: | 23 Jul 2025 03:09 |
| URI: | http://repository.its.ac.id/id/eprint/42237 |
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