Multistage Rule-Based Positioning Optimization for High-Precision LPAT

Nurhadi, Hendro (2011) Multistage Rule-Based Positioning Optimization for High-Precision LPAT. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 60.

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Abstract

This paper proposes a multistage rule-based precision positioning control method for the linear piezoelectrically actuated table (LPAT). During the coarse-tuning stage, the LPAT is actuated by coarse voltage schemes toward the target of 20 μm at a higher velocity, and during the fine-tuning stage, it is steadily and accurately driven by the fine voltage scheme to reach the target position. The rule-based method is employed to establish the control rules for the voltages and displacements of the two stages using statistical methods. The experimental results demonstrate that the proposed control method can quickly reach steady state, and the steady-state error can be reduced to less than or equal to 0.02 μm for small travel (±0.1 μm) and large travel (±20 mm).

Item Type: Article
Uncontrolled Keywords: Coarse tuning, fine tuning, linear motion, multistage control, optimization, piezoelectrically actuated table, rule-based method (RBM).
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Industrial Technology > Mechanical Engineering
Depositing User: Mr. Tondo Indra Nyata
Date Deposited: 09 Aug 2019 07:19
Last Modified: 27 Aug 2019 01:05
URI: http://repository.its.ac.id/id/eprint/70231

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