Multistage Rule-Based Positioning Optimization for High-Precision LPAT

Nurhadi, Hendro (2011) Multistage Rule-Based Positioning Optimization for High-Precision LPAT. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 60.

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This paper proposes a multistage rule-based precision
positioning control method for the linear piezoelectrically
actuated table (LPAT). During the coarse-tuning stage, the LPAT
is actuated by coarse voltage schemes toward the target of 20 μm
at a higher velocity, and during the fine-tuning stage, it is steadily
and accurately driven by the fine voltage scheme to reach the
target position. The rule-based method is employed to establish the
control rules for the voltages and displacements of the two stages
using statistical methods. The experimental results demonstrate
that the proposed control method can quickly reach steady state,
and the steady-state error can be reduced to less than or equal to
0.02 μm for small travel (±0.1 μm) and large travel (±20 mm).

Item Type: Article
Uncontrolled Keywords: Coarse tuning, fine tuning, linear motion, multistage control, optimization, piezoelectrically actuated table, rule-based method (RBM).
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Industrial Technology > Mechanical Engineering
Depositing User: Mr. Tondo Indra Nyata
Date Deposited: 09 Aug 2019 07:19
Last Modified: 27 Aug 2019 01:05

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