Fadillah, Firdos Nur (2019) Analisis Pengaruh Konsentrasi Prekursor dan Doping Aluminium terhadap Karakteristik Thin Film ZnO sebagai Sensor Gas SO2 dengan Metode Deposisi Spray Pyrolysis. Other thesis, Institut Teknologi Sepuluh Nopember.
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Abstract
ZnO merupakan material semikonduktor yang secara luas digunakan dalam berbagai aplikasi teknologi, seperti sensor gas. Pada proses pembuatan lapisan ZnO, Zinc acetate dyhidrate digunakan sebagai prekursor dan metanol sebagai pelarut yang dideposisikan pada material kaca borosilikat dengan metode spray pyrolysis. Variasi konsentrasi prekursor dan penambahan doping mempengaruhi karakteristik lapisan ZnO. Penelitian ini menganalisis pengaruh konsentrasi prekursor dan penambahan doping Aluminium terhadap karakteristik lapisan tipis ZnO sebagai aplikasi untuk sensor gas SO2. Variasi konsentrasi prekursor yang diteliti yaitu 0,05M, 0,1M, 0,15M, dan 0,2M. Sementara penambahan doping Aluminium sebesar 4%. Dari hasil pengujian XRD ditunjukkan peningkatan kristalinitas ZnO, sedangkan pada penambahan doping Aluminium terjadi penurunan kristalinitas ZnO. Pada hasil pengujian SEM-EDX menunjukkan morfologi dengan butir semakin membesar sedangkan penambahan doping Aluminium menyebabkan morfologi banyak retakan tetapi lebih padat dan halus. Pada hasil pengujian UV-Vis ditunjukkan peningkatan absorbansi dan penurunan energi band gap, sedangkan penambahan doping Aluminium menyebabkan penurunan absorbansi dan peningkatan energi band gap. Pada uji sensitivitas sensor gas SO2 ditunjukkan peningkatan sensitivitas gas sedangkan penambahan doping Aluminium menurunkan temperatur operasi thin film ZnO.
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ZnO is a semiconductor material that is widely used in various technological applications, such as gas sensors. In the process of making ZnO film, Zinc acetate dehydrate is used as a precursor and methanol as a solvent which is deposited on borosilicate glass material with the spray pyrolysis method. Variations in precursor concentration and the addition of doping affect the characteristics of the ZnO layer. This research is aimed to analyze the effect of the concentration of precursors and Aluminium doping additions on the characteristics of the ZnO thin film as an application for the SO2 gas sensor. Variations in concentration of precursors studied were 0.05M, 0.1M, 0.15M, and 0.2M. While the addition of Aluminum doping is 4%. From the test results of XRD showed an increase in ZnO crystallinity, while the addition of Aluminum doping occurred decreased the crystallinity of ZnO. From the SEM-EDX test, grain morphology was getting bigger, meanwhile, Aluminum doping addition caused many cracks on the morphology but made the surface became denser and smoother. the UV-Vis test results, showed increasing in absorbance but decreasing the bandgap energy meanwhile, the addition of Aluminum doping caused decreasing in absorbance but increasing the bandgap energy. The SO2 gas sensor sensitivity test showed increasing in gas sensitivity meanwhile, the addition of Aluminum doping decreased the operating temperature of ZnO thin film.
| Item Type: | Thesis (Other) |
|---|---|
| Additional Information: | RSMt 530.427 5 Fad a-1 2019 |
| Uncontrolled Keywords: | ZnO, spray pyrolysis,borosilicate glass, gas sensor |
| Subjects: | Q Science > QD Chemistry > QD281 Pyrolysis T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7871.674 Detectors. Sensors |
| Divisions: | Faculty of Industrial Technology > Material & Metallurgical Engineering > 28201-(S1) Undergraduate Thesis |
| Depositing User: | Fadillah Firdos Nur |
| Date Deposited: | 06 Jun 2023 07:28 |
| Last Modified: | 06 Jun 2023 07:28 |
| URI: | http://repository.its.ac.id/id/eprint/65865 |
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