Fauzi, Desta Zul (2023) Pengaruh Komposisi Gas Ar:N2 dan Penambahan Ni-Co Terhadap Pelapisan CrN Thin Film Menggunakan Metode Reactive Sputtering Yang Dideposisikan pada AISI 4140. Masters thesis, Institut Teknologi Sepuluh Nopember.
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Abstract
Baja paduan AISI 4140 sering digunakan untuk komponen pada industri otomotif seperti gear, shaft, sprocket dimana komponen ini diperlukan kekerasan dan ketahanan aus yang tinggi. Dalam penelitian ini telah dilakukan deposisi chromium nitride (CrN) dengan menggunakan metode reactive sputtering. Pemilihan pelapis berbasis CrN sebagai pelapis karena memiliki kekerasan yang tinggi dan ketahanan aus yang baik. Penelitian ini dilakukan proses deposisi menggunakan reactive sputtering dengan menggunakan parameter proses yaitu komposisi gas N2 (10% N2, Ar:15% N2, 20% N2) serta penambahan nikel dan cobalt sebesar 10% pada target chromium dengan metode mozaik yang dideposisikan pada AISI 4140. Hasil XRD didapatkan fasa CrN di semua parameter proses sputtering. Sedangkan masing-masing fasa Ni dan Co juga terlihat di parameter penambahan nikel dan cobalt. Perhitungan ukuran kristal dengan menggunakan persamaan Debye Scherer didapatkan ukuran kristal berkisar antara 19.44 nm sampai 53.5 nm. Hasil AFM didapatkan nilai kekasaran terendah sebesar 9.29 nm sedangkan kekasaran tertinggi sebesar 12.3 nm. Uji AFM menunjukkan bahwa semakin meningkatnya nitrogen menghasilkan kenaikan kekasaran permukaan. Hasil uji SEM-EDX menunjukkan bahwa semakin bertambahnya nitrogen, maka akan mengurangi atom-atom chromium yang terpercik menuju substrat. Uji kekerasan menunjukkan hasil sputtering chromium nitride tanpa dan dengan adanya penambahan nikel maupun cobalt dapat meningkatkan kekerasan dari AISI 4140. Hasil uji kekerasan didapatkan nilai kekerasan tertinggi adalah 359,5 HVN0.2. Hasil uji keausan menunjukkan hasil sputtering chromium nitride tanpa dan dengan adanya penambahan nikel maupun cobalt dapat menurunkan laju keausan dari AISI 4140. Hasil uji keausan didapatkan nilai kekerasan terendah adalah 4,0 x 10-1 mm3/Nm.
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AISI 4140 alloy steel is often used for components in the automotive industry such as gears, shafts, sprockets where these components require high hardness and wear resistance. In this research, chromium nitride (CrN) deposition has been carried out using the reactive sputtering method. The choice of CrN-based coatings as coatings is due to their high hardness and good wear resistance. This research was carried out using reactive sputtering deposition using process parameters, namely the composition of N2 gas (10% N2, Ar: 15% N2, 20% N2) and the addition of 10% nickel and cobalt to the chromium target using the mosaic method deposited on AISI 4140. Results XRD obtained CrN phase in all sputtering process parameters. While each of the Ni and Co phases is also seen in the parameters of the addition of nickel and cobalt. Calculation of crystal size using Debye Scherer's purchases obtained crystal sizes ranging from 19.44 nm to 53.5 nm. The AFM results obtained the lowest roughness value of 9.29 nm while the highest roughness was 12.3 nm. AFM test showed that increasing the increase in nitrogen resulted in surface roughness. The results of the SEM-EDX test showed that the more nitrogen was added, the less chromium atoms splashed onto the substrate. The hardness test showed that the results of sputtering chromium nitride without and with the addition of nickel or cobalt increased the hardness of AISI 4140. The highest hardness value was 359.5 HVN0.2 The results of the wear test showed that chromium nitride sputtering without and with the addition of nickel or cobalt could reduce the wear level of AISI 4140. The results of the wear test showed that the lowest hardness value was 4.0 x 10-1 mm3 /Nm.
| Item Type: | Thesis (Masters) |
|---|---|
| Uncontrolled Keywords: | AISI 4140, Reactive Sputtering, Chromium Nitride, Komposisi Gas, Nitrogen AISI 4140, Reactive Sputtering, Chromium Nitride, Gas Composition, Nitrogen |
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) > TA418.16 Materials--Testing. T Technology > TA Engineering (General). Civil engineering (General) > TA418.9.C57 Coatings T Technology > TA Engineering (General). Civil engineering (General) > TA491 Metal coating. T Technology > TJ Mechanical engineering and machinery > TJ561 Surface |
| Divisions: | Faculty of Industrial Technology and Systems Engineering (INDSYS) > Material & Metallurgical Engineering > 27101-(S2) Master Thesis |
| Depositing User: | Desta Zul Fauzi |
| Date Deposited: | 12 Feb 2023 01:11 |
| Last Modified: | 12 Feb 2023 01:11 |
| URI: | http://repository.its.ac.id/id/eprint/96823 |
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